Сенсорные микросистемы на поверхностных акустических волнах

Abstract

The most promising tendency in development сенсорики represents mining of intelligent sensor} microsystems (ISMS) on the basis of integf-ating sensory, processor and actuators. At present work the problems ofdesigning ISMS with SA W with frequency band 100 MHz — 2 GHz conforming to dimensional area of technology micro and a nanoelectronics and the microelectromechanics are discussed. The main control parameters of ISMS with SAW are determined. The SAW phase velocity is determined as an implicit function of quasistatic gradients of displacement, electrical field, temperature, thicknesses of layers, orientation of layers and substrate, internal mechanical stresses in layers. The same values determine the factor of a substrate in sensitivity of a SAW phase velocity to loading a surface. The physical channel of change of a SAWphase velocity yO is characterized by the set ofpartial sensitivity indexes of a SAW phase velocity to changes of independent thermodynamic variables. In case of quasi-homogeneous volumetric and surface effects as last act deformation of a substrate Лг], external electrical field Ej, temperature T and structure of ambient atmosphere (concentration a component Nk)- The physical channel is representable by the way.