Browsing Материалы сборника по статьям by Author "Гулай, В. А."
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Получение туннельных сенсорных МДМ-наноструктур на основе оксидов РЗЭ
Колешко, В. М.; Гулай, А. В.; Гулай, В. А. (БНТУ, 2007)The vacuum deposition process and electrophysical parameters of super-thin fdms of rare earth elements (REE) oxides at reactive magnetron dispersion of metallic targets in the mixture of argon and oxygen were investigated. It is established that in the optimum technological regime (voltage discharge 400- 440 V, underlayer temperature 573-598 К) the o.xides of yttrium and holmium ...2020-06-01