| dc.contributor.author | Колешко, В. М. | ru |
| dc.contributor.author | Полынкова, Е. В. | ru |
| dc.coverage.spatial | Минск | ru |
| dc.date.accessioned | 2016-10-03T06:47:17Z | |
| dc.date.available | 2016-10-03T06:47:17Z | |
| dc.date.issued | 2006 | |
| dc.identifier.citation | Колешко, В. М. Микро- и наномеханика микросистемной техники / В. М. Колешко, Е. В. Полынкова // Теоретическая и прикладная механика : международный научно-технический сборник. – Вып. 20. – 2006. – С. 17-24. | ru |
| dc.identifier.uri | https://rep.bntu.by/handle/data/25445 | |
| dc.language.iso | ru | ru |
| dc.publisher | БНТУ | ru |
| dc.title | Микро- и наномеханика микросистемной техники | ru |
| dc.type | Article | ru |
| local.description.annotation | While engineering, manufacturing and operation of MEMS and NMS it is necessary to analyze micro-and nano-mechanics of used materials and thin-film constructions of microsystem technique. One of perspective prediction micro- nanotechnical material properties methods is building and research of deformation mechanism diagrams (DMD). The thin films DMD are constructed and researched which have various types of crystal. | |
