Микро- и наномеханика микросистемной техники
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While engineering, manufacturing and operation of MEMS and NMS it is necessary to analyze micro-and nano-mechanics of used materials and thin-film constructions of microsystem technique. One of perspective prediction micro- nanotechnical material properties methods is building and research of deformation mechanism diagrams (DMD). The thin films DMD are constructed and researched which have various types of crystal.
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Колешко, В. М. Микро- и наномеханика микросистемной техники / В. М. Колешко, Е. В. Полынкова // Теоретическая и прикладная механика : международный научно-технический сборник. – Вып. 20. – 2006. – С. 17-24.