Микрочип лазер для использования в лидарных системах беспилотного транспорта
Another Title
Microchip laser for the usage in lidar systems of unmanned vehicles
Abstract
В результате выполнения исследовательской работы разработан компактный высокочастотный источник лазерного излучения (твердотельный микрочип лазер) с длиной волны в спектральной области 1,5 мкм для лидарной системы, предназначенной для обеспечения безопасности пути во время хода поезда.
Abstract in another language
The paper presents an analysis and experimental study of a method for compensating diffraction effects in projection photolithography by introducing a transparent liquid between a photo template and a silicon wafer. The method is based on the use of a liquid with a high refractive index, which leads to an increase in the numerical aperture of the projection system and a decrease in the critical size of the structure without changing the exposure wavelength. Additionally, the liquid reduces the amplitude of standing waves in the photoresist, eliminating interference patterns and increasing the uniformity of the resulting pattern. The data obtained confirm the effectiveness of immersion photolithography as a method for compensating diffraction effects and demonstrate its promise for further reducing the size of elements.