Марван, Ф. С. Х. Аль-Камали (БНТУ, 2023)
The sol-gel method of SiO2:CuO target formation is developed. The results of investigation of features of obtaining targets on the basis of aerosil A-380 copper salts are presented. The data on the structure and morphology of high-silica films obtained by ion-beam sputtering in vacuum of targets on the polished surface of silicon substrate are presented. The fields of application ...
2023-11-11