Применение внутрирезонаторной лазерной спектроскопии для контроля параметров волноводных структур

Abstract

A new technique of intracavity waveguide spectroscopy for studying waveguide structures is proposed. This approach is based on recording and processing of the intensity angular distribution of the light beam reflected from the prism coupler in the case of guided mode excitation in waveguide structures by the laser intracavity radiation. The laser beam is coupled into a waveguide by the parallelepiped coupling prism, in which the intracavity radiation enters the input faces of the prism at the Brewster angles and undergoes double internal reflection in the prism. Excitation of the waveguide at the weak coupling makes it possible to reduce the influence of the coupling prism that increases the measurement precision.