Дисперсионные зависимости поверхностных акустических волн в структуре LilNbO,/a:C

Abstract

From the point ofview the microelectromechanics the surface acoustic waves (SA W) in multilayer structures consisting of a crystalline substrate and several parallel plate functional layers of different thickness from crystalline, polycrystallic, nanostructured or amorphous materials. One of the most perspective material of a SAW substrate is the single-crystal lithium niobate having a high electromechanical coefficient and used in different passive and active devices of an acoustoelectronics from filters up to nonlinear circuits ofmemory and SAW sensors. The single crystal of a niobate of lithium is, alongside with crystal, one of the most studied acoustic crystal, for which all material constants of the second and third orders are known. At the same time there is in many respects obscure a SAW deformation sensitivity in this crystal, and also range of possible control of SAW the characteristics by means of the introducing in a LiNbOS-acoustic line ofdifferent functional layers. In the present study these problems are clarified on an example of a layer of nanostructured carbon mateial containing, in particular, the ordered set carbon nanotubes.