New technology from lab to fab: a case study on EUV lithography
| dc.contributor.author | Jinho, Ahn | ru |
| dc.coverage.spatial | Минск | ru |
| dc.date.accessioned | 2021-01-15T11:00:23Z | |
| dc.date.available | 2021-01-15T11:00:23Z | |
| dc.date.issued | 2019 | |
| dc.identifier.citation | Jinho Ahn, Dr. New technology from lab to fab: a case study on EUV lithography / Dr. Jinho Ahn // Наука. Инновации. Производство = Science. Innovation. Production : сборник материалов VI Белорусско-Корейского научно-технического форума, 10 апреля 2019 г. / Belarusian National Technical University. – Minsk : BNTU, 2019. – С. 10. | ru |
| dc.identifier.uri | https://rep.bntu.by/handle/data/83325 | |
| dc.language.iso | en | ru |
| dc.publisher | БНТУ | ru |
| dc.title | New technology from lab to fab: a case study on EUV lithography | ru |
| dc.type | Working Paper | ru |
