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    • Low-power gas sensor on nanostructured dielectric membrane 

      Belahurov, E. A.; Khatko, V. V.; Gorokh, G. G.; Zakhlebayeva, A. I.; Reutskaya, O. G.; Taratyn, I. A. (Новые технологии, 2015)
      The article presents a technology for manufacture of a gas sensor with a two-layer nanostructured dielectric membrane on a silicon substrate and its characteristics. Selection of the correct mathematical model ensures a good correlation between the experimental and calculated current-voltage characteristics of the sensor and makes it possible to evaluate the effect of porosity ...
      2018-07-06